Projekty Mobile ALD system for in-vacuo surface science measurements (MOBIALD)

The MOBIALD project wants surface and interface engineering by atomic layer deposition (ALD) to profit directly from high-end surface science characterization by a mobile ALD system able to perform surface modification by plasma and atomic layer deposition. The prime objective is twofold: (i) MOBIALD delivers a mobile ALD system demonstrator with in-vacuo sample transfer for scientific studies at exactly the place where high and ultrahigh vacuum (HV/UHV) measurement systems are installed – be it in specialized laboratories or national/international research facilities, and (ii) will provide proof of surface science measurements obtained with the mobile ALD system demonstrator. The surface science measurements include X-ray absorption spectroscopy (X-ray fluorescence spectroscopy and total electron yield measurement) conducted at the Polish SOLARIS synchrotron facility by the polish AGH partner as well as X-ray photoelectron spectroscopy studies at an AGH laboratory-based instrument by the same group. The scientific goals comprise the characterization of the nucleation and early-stage growth of Al2O3, ZnO, and Cu-oxide on metal and hydroxylated surfaces, specifically how and to which extent adsorption and chemisorption of the ALD gas precursors occurs after every half-cycle of the sequentially supplied ALD gases. These measurements will inform about important aspects of the interface as well as the growing film, such as the oxidation state, the chemical and electronic state of the atoms, and the elemental composition. MobiALD achieves the prime goals by its consortium which unites complementary expertise in the fields of (a) ALD reactor simulations for uniform temperature and laminar gas flow (Swiss research partner EMPA), b) ALD gas and plasma process control and safety (Polish research partner CBRTP), c) surface science studies (Polish research partner AGH), and d) CAD manufacturing of tailored process reactors (Polish industry partner MeasLine).

Implementation period: 01.04.2025 – 31.03.2027
Total eligible amount of the project: 4 646 320,32 PLN
Grant amount: 4 478 140,32 PLN

- Centrum Badań i Rozwoju Technologii dla Przemysłu S.A.
- Akademia Górniczo-Hutnicza im. St. Staszica w Krakowie
- MeasLine Sp. z o.o.
- EMPA, Swiss Laboratories of Materials Science and Technology, Laboratory for Mechanics of Materials and Nanostructures